Light element analysis in amorphous and nanocrystalline silicon using ERDA and related techniques
Master Thesis
2006
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University of Cape Town
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Abstract
In this work, investigation of light elements incorporated in the amorphous silicon network of hydrogenated and nanocrystalline silicon were analysed by using ion beam analytical techniques. To do this, amorphous silicon films were deposited by hot wire chemical vapour deposition, and a unique sampling method was developed for the analysis of nanocrystalline silicon powder. The combinations of non destructive, quantitative and sensitive Rutherford backscattering, resonance scattering and elastic recoil detection analysis were used in analysing these samples.
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Word processed copy.
Includes bibliographical references (leaves 83-87).
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Adegbite, O. 2006. Light element analysis in amorphous and nanocrystalline silicon using ERDA and related techniques. University of Cape Town.